In order to solve the general photoelectric sensor of temperature on voltage measurement system， the effect is not easy process problems， this paper puts forward a kind of electrostatic voltage sensor， the diaphragm established its mathematical model and analyzes its stability and the measurement Theoretically electrostatic diaphragm voltage sensor to measure poling voltage requirements than the peak voltage， which is difficult to meet the conditions， thus puts forward a kind of method reducing polarization voltage and the simulation analysis， the results showed that the polarization voltage to less than the peak voltage under the condition of diaphragm， electrostatic voltage sensor can realize accurate， fast measure
